ntub etching yog txheej txheem tshem tawm cov khoom siv kua chemicals lossis etchantstshem tawm cov ntaub ntawv los ntawm wafer. Cov patters tshwj xeeb yog txhais los ntawm photoresist lub ntsej muag ntawm lub wafer. Cov ntaub ntawv uas tsis muaj kev tiv thaiv los ntawm lub npog ntsej muag no raug tshem tawm los ntawm cov tshuaj ua kua.
Cov ntaub ntawv qhia twg raug tshem tawm?
Plag: Etching yog hais txog kev tshem tawm cov khoom ntawm qhov chaw wafer. Cov txheej txheem feem ntau yog ua ke nrog lithography txhawm rau xaiv thaj chaw tshwj xeeb ntawm wafer los ntawm cov khoom siv yuav raug tshem tawm.
Puas tshem tawm cov khoom?
Tshuaj etching yog ib txoj hauv kev engraving uas siv lub siab kub-kub tshuaj tsuag kom tshem tawm cov khoom los tsim ib daim duab mus tas li etched hauv hlau. Lub npog ntsej muag lossis tiv thaiv yog siv rau saum npoo ntawm cov khoom thiab yog xaiv tshem tawm, nthuav tawm cov hlau, los tsim cov duab uas xav tau.
Dab tsi yog cov kauj ruam ntawm kev ntub dej?
Ib txheej txheem ntub dej etching yuav raug muab faib ua peb (3) cov kauj ruam yooj yim: 1) diffusion ntawm etchant rau saum npoo kom tshem tawm; 2) cov tshuaj tiv thaiv ntawm etchant thiab cov khoom raug tshem tawm; thiab 3) diffusion ntawm cov tshuaj tiv thaiv byproducts los ntawm reacted nto.
Dab tsi yog siv los tshem tawm cov khoom hauv qhuav etching?
Dry etching yog hais txog kev tshem tawm cov khoom, feem ntau yog cov qauv npog ntawm cov khoom siv semiconductor, los ntawm kev nthuav tawm theCov khoom siv rau kev foob pob ntawm ions (feem ntau yog cov roj ntsha ntawm cov pa roj ntsha xws li fluorocarbons, oxygen, chlorine, boron trichloride; qee zaum nrog ntxiv ntawm nitrogen, argon, helium thiab lwm yam gases) uas …
