Nyob rau hauv cov ntaub ntawv ntawm semiconductor lithography (tseem hu ua photolithography) peb cov pob zeb yog silicon wafers thiab peb cov qauv sau nrog lub teeb rhiab polymer hu ua photoresist.
Koj txhais li cas los ntawm photolithography?
Photolithography, tseem hu ua kho qhov muag lithography lossis UV lithography, yog txheej txheem siv hauv microfabrication rau cov qauv ntawm cov zaj duab xis nyias los yog ntau ntawm cov substrate (tseem hu ua wafer). … Txoj kev no tuaj yeem tsim cov qauv me me, nqis mus rau ob peb kaum nanometers loj.
Vim li cas lithography siv hauv kev tsim khoom semiconductor?
Photolithography yog txheej txheem siv hauv microfabrication hloov cov qauv geometric rau zaj duab xis lossis substrate. Geometric duab thiab cov qauv ntawm ib lub semiconductor ua rau cov txheej txheem nyuaj uas tso cai rau cov dopants, hluav taws xob thiab cov xov hlau los ua kom tiav ib lub voj voog thiab ua tiav lub hom phiaj thev naus laus zis.
Lub hom phiaj ntawm photolithography yog dab tsi?
Photolithography yog ib txoj hauv kev tseem ceeb tshaj plaws thiab yooj yim tshaj plaws ntawm microfabrication, thiab yog siv los tsim cov qauv ntxaws hauv cov khoom. Hauv cov qauv no, cov duab lossis cov qauv tuaj yeem raug etched los ntawm kev xaiv raug ntawm lub teeb rhiab polymer rau lub teeb ultraviolet.
Cov khoom siv semiconductor lithography yog dab tsi?
cov khoom siv semiconductor lithography yog siv nyob rau theem raug ntawm semiconductor-chipmanufacturing process. … Semiconductor lithography cov cuab yeej siv lub lens projection los txo cov qauv hauv Circuit Court, uas yog sau rau ntawm lub phaj qub hu ua reticle, thiab nthuav tawm cov qauv mus rau wafer.
